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research article
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
Type
research article
Web of Science ID
WOS:000426331800047
Authors
del Corro, PG
•
Imboden, M
•
Perez, DJ
•
Bishop, DJ
•
Pastoriza, H
Publication date
2018
Published in
Volume
271
Start page
409
End page
417
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
November 8, 2018
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