Port: A Piezoelectric Optical Resonance Tuner

This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q(optical) of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of <1 mu s.


Publié dans:
Ieee Micro Electro Mechanical Systems (Mems), 739-742
Présenté à:
31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Belfast, NORTH IRELAND, Jan 21-25, 2018
Année
2018
Publisher:
New York, IEEE
ISSN:
1084-6999
ISBN:
978-1-5386-4782-0
Mots-clefs:
Laboratoires:




 Notice créée le 2018-11-08, modifiée le 2018-12-17


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