000259704 001__ 259704
000259704 005__ 20181217142548.0
000259704 020__ $$a978-1-5386-4782-0
000259704 022__ $$a1084-6999
000259704 0247_ $$2doi$$a10.1109/MEMSYS.2018.8346661
000259704 037__ $$aCONF
000259704 245__ $$aPort: A Piezoelectric Optical Resonance Tuner
000259704 269__ $$a2018
000259704 260__ $$aNew York$$bIEEE$$c2018
000259704 336__ $$aConference Papers
000259704 490__ $$aProceedings IEEE Micro Electro Mechanical Systems
000259704 520__ $$aThis abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q(optical) of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of <1 mu s.
000259704 6531_ $$akerr frequency combs
000259704 700__ $$aDung, Bin
000259704 700__ $$aTian, Hao
000259704 700__ $$0242444$$aZervas, Michael
000259704 700__ $$0244694$$aKippenberg, Tobias J.
000259704 700__ $$aBhave, SA
000259704 7112_ $$a31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS)$$cBelfast, NORTH IRELAND$$dJan 21-25, 2018
000259704 773__ $$q739-742$$tIeee Micro Electro Mechanical Systems (Mems)
000259704 909C0 $$0252348$$pLPQM$$xU11831$$xU11892
000259704 909CO $$ooai:infoscience.epfl.ch:259704$$pSB$$pSTI$$pconf
000259704 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000259704 980__ $$aCONF
000259704 980__ $$aWoS