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research article
Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI
Type
research article
Web of Science ID
WOS:000425326300001
Authors
Esfahani, MN
•
Kilinc, Y
•
Karakan, MC
•
Orhan, E
•
Hanay, MS
•
Leblebici, Y
•
Alaca, BE
Publication date
2018
Published in
Volume
28
Issue
4
Article Number
045006
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record