Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides

research article

Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides

Pfeiffer, MHP

•

Herkommer, C

•

Liu, J

2018

IEEE Journal of Selected Topics in Quantum Electronics

Type

research article

DOI

10.1109/JSTQE.2018.2808258

Web of Science ID

WOS:000436924400001

Authors

Pfeiffer, MHP

•

Herkommer, C

•

Liu, J

•

Morais, T

•

Zervas, M

•

Geiselmann, M

•

Kippenberg, TJ

Publication date

2018

Published in

IEEE Journal of Selected Topics in Quantum Electronics

Volume

24

Issue

4

Article Number

6101411

Peer reviewed

REVIEWED

EPFL units

Available on Infoscience

November 8, 2018

Use this identifier to reference this record

https://infoscience.epfl.ch/handle/20.500.14299/150776