Loading...
research article
Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides
Type
research article
Web of Science ID
WOS:000436924400001
Author(s)
Pfeiffer, MHP
•
Herkommer, C
•
Liu, J
•
Morais, T
•
Zervas, M
•
Geiselmann, M
•
Kippenberg, TJ
Date Issued
2018
Volume
24
Issue
4
Article Number
6101411
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record