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2018
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator
conference paper
Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) and c(44) from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.
Type
conference paper
Author(s)
Date Issued
2018
Publisher
Publisher place
New York
Journal
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN of the book
978-1-5386-4782-0
Start page
763
End page
766
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Belfast, NORTH IRELAND | Jan 21-25, 2018 | |
Available on Infoscience
November 8, 2018
Use this identifier to reference this record