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research article
Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
De Pastina, A
•
Maillard, D
•
Villanueva, LG
Type
research article
Web of Science ID
WOS:000428828500014
Authors
De Pastina, A
•
Maillard, D
•
Villanueva, LG
Publication date
2018
Published in
Volume
192
Start page
83
End page
87
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record