Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
2018
Details
Title
Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
Author(s)
De Pastina, A ; Maillard, D ; Villanueva, LG
Published in
MICROELECTRONIC ENGINEERING
Volume
192
Pages
83-87
Date
2018
Other identifier(s)
View record in Web of Science
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-11-08