Abstract

We present the first flexible dual-side single-photon avalanche diode (SPAD) image sensor in array format. The image sensor comprises 32x32 pixels, whereas a special layout and fabrication flow were developed to fabricate the sensor. SPAD breakdown voltage, noise, sensitivity and crosstalk were thoroughly analyzed. The sensor is operated both in frontside- (FSI) and backside-illumination (BSI), whereas a dual-objective camera demo was built to simultaneously demonstrate the sensor in FSI and BSI modes.

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