Bioresorbable Frequency-Selective Magnesium Microresonators Fabricated by Ion Beam Etching

We present an innovative microfabrication process to fabricate magnesium-based bioresorbable microelectromechanical systems (MEMS) by ion beam etching. This process enables the fabrication of thin biodegradable water-soluble passive electronic components with minimal exposure to aqueous media, by a novel physical vapor deposition, photolithography and dry etching sequence. We demonstrate the design, fabrication and characterization of frequency-selective magnesium RF micro-resonators in air and in water, and compare the results to values obtained by finite element modeling (FEM). Such resonators are candidates for selectively-addressable RF power receivers for bioresorbable wireless implantable medical devices.


Advisor(s):
Boero, Giovanni
Brugger, Jürgen
Presented at:
Microtechnologies in Medicine and Biology, Monterey, USA, 26-28 March 2018
Year:
Mar 26 2018
Keywords:
Laboratories:




 Record created 2018-05-15, last modified 2018-09-13

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