Piezoelectric Nanoelectromechanical Systems
Howell, Kaitlin; De Pastina, Annalisa; Lozzi, Andrea; Larsen, Tom; Faizan, Muhammad; Villanueva, Guillermo
2017

Abstract

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.

Details

Title Piezoelectric Nanoelectromechanical Systems
Author(s) Howell, Kaitlin ; De Pastina, Annalisa ; Lozzi, Andrea ; Larsen, Tom ; Faizan, Muhammad ; Villanueva, Guillermo
Pagination 4
Conference Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017
Date 2017-07-27
Keywords
DOI https://doi.org/10.1109/TRANSDUCERS.2017.7994010
Laboratories NEMS
Record Appears in Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Record creation date 2018-02-02

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