Piezoelectric Nanoelectromechanical Systems
2017
Abstract
In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.
Details
Title
Piezoelectric Nanoelectromechanical Systems
Author(s)
Howell, Kaitlin ; De Pastina, Annalisa ; Lozzi, Andrea ; Larsen, Tom ; Faizan, Muhammad ; Villanueva, Guillermo
Pagination
4
Conference
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017
Date
2017-07-27
Keywords
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Record creation date
2018-02-02