Details
Title
Bernasconi, Johana
Sciper ID
194722
Affiliated labs
NAM
Publications
Coherence management in lithography printing systems
High power ultraviolet LED illumination systems: coherence properties and applications in photolithography
High-power modular LED-based illumination systems for mask-aligner lithography
Spatial coherence properties of an LED-based illumination system for mask-aligner lithography
Structured amplitude and phase fields behind microstructures: The quest for high contrast modulation at proximity
High power ultraviolet LED illumination systems: coherence properties and applications in photolithography
High-power modular LED-based illumination systems for mask-aligner lithography
Spatial coherence properties of an LED-based illumination system for mask-aligner lithography
Structured amplitude and phase fields behind microstructures: The quest for high contrast modulation at proximity
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