Details
Title
Bayat, Dara
Sciper ID
171962
Affiliated labs
SAMLAB
Publications
3D Assembly Using Au-Si Eutectic and Au-Au Thermocompression Wafer Level Bonding for M(O)EMS Device Fabrication
Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism
Dynamic behavior of the tuning fork AFM probe
Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads
Large Hybrid High Precision MEMS Mirrors
Microfrabricated Mirrors For Space Applications
Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism
Dynamic behavior of the tuning fork AFM probe
Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads
Large Hybrid High Precision MEMS Mirrors
Microfrabricated Mirrors For Space Applications
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