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  4. Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads
 
conference paper

Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

Ataman, Caglar
•
Lani, Sébastien  
•
Noell, Wilfried  
Show more
2011
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
MEMS 2011

This paper reports a high fill-factor (>90%), 2-dimensional analog micromirror array designed specifically for very high, optically induced thermal load applications. Each pixel can attain a mechanical DC rotation angle of ±4 degrees around any arbitrary axis with 170V excitation. The maximum temperature rise on the mirror surface with 7 KW/m2 thermal load under 1 Pa ambient pressure is below 230 °C. A detailed assessment of the fabrication process –including the poly-Si vertical electrodes, wafer level mirror bonding, and copper electroplating of structural layers–, and characterization methodology is presented with experimental results.

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Type
conference paper
DOI
10.1109/MEMSYS.2011.5734517
Web of Science ID

WOS:000295841200170

Author(s)
Ataman, Caglar
Lani, Sébastien  
Noell, Wilfried  
Jutzi, Fabio  
Bayat, Dara  
de Rooij, Nico  
Date Issued

2011

Publisher

Ieee Service Center

Publisher place

Piscataway, NJ

Published in
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Series title/Series vol.

Proceedings: Ieee Micro Electro Mechanical Systems

Start page

684

End page

687

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
MEMS 2011

Cancun, Mexico

January 23-27, 2011

Available on Infoscience
February 8, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/64076
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