Details
Title
Baborowski, Jacek
Sciper ID
117055
Publications
Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
Downscaling of Pb(Zr,Ti)O-3 film thickness for low-voltage ferroelectric capacitors: Effect of charge relaxation at the interfaces
Etching of RuO2 and Pt thin films with ECR/RF reactor
High temperature micro-hotplate
Mechanisms of Pb(Zr0.53Ti0.47)O-3 thin film etching with ECR/RF reactor
Metallic supporting grid for ultrathin electrolyte membranes in solid oxide fuel cells
Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films
Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
Piezoelectric micro-system for the active vibratory insulation of vibration sensitive components
Sputtered silicon carbide thin films as protective coating for MEMS applications
See complete list of publications (24)
Downscaling of Pb(Zr,Ti)O-3 film thickness for low-voltage ferroelectric capacitors: Effect of charge relaxation at the interfaces
Etching of RuO2 and Pt thin films with ECR/RF reactor
High temperature micro-hotplate
Mechanisms of Pb(Zr0.53Ti0.47)O-3 thin film etching with ECR/RF reactor
Metallic supporting grid for ultrathin electrolyte membranes in solid oxide fuel cells
Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films
Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
Piezoelectric micro-system for the active vibratory insulation of vibration sensitive components
Sputtered silicon carbide thin films as protective coating for MEMS applications
See complete list of publications (24)
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Baborowski, J.
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