Details
Title
Martin, Fabrice
Sciper ID
156111
Affiliated labs
LC
Publications
AlN thin film as waveguide for shear acoustic waves
Piezoelectric materials parameters for piezoelectric thin films in GHz applications
Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films
Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator
Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
Thickness dependence of the properties of highly c-axis textured AlN thin films
Piezoelectric materials parameters for piezoelectric thin films in GHz applications
Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films
Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator
Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
Thickness dependence of the properties of highly c-axis textured AlN thin films
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Martin, F.
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