Loading...
research article
Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
Use this identifier to reference this record
Type
research article
Web of Science ID
WOS:000238920900015
Authors
Publication date
2006
Volume
53
Issue
7
Start page
1339
End page
1343
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 18, 2007