Details
Title
Pavius, Michaël
Sciper ID
158556
Affiliated labs
CMI
Publications
Bow-tie optical antenna probes for single-emitter scanning near-field optical microscopy
Profile angle control in SIO2 deep anisotropic dry etching for MEMS fabrication
Profile angle control in SIO2 deep anisotropic dry etching for MEMS fabrication
Use for
Pavius, M.
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