Details
Title
Calame, Florian
Sciper ID
111410
Publications
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
Growth and properties of gradient free sol-gel lead zirconate titanate thin films
Local growth of sol-gel films by means of microhotplates
Novel 3D PZT thin film structure for micromechanics
PZT thin film growth and chemical composition control on flat and novel three-dimensional micromachined structures for MEMS devices
Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films
Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices
Taking piezoelectric microsystems from the laboratory to production
Thick PZT sol-gel films for pMUT transducers performances improvement
Vibration Energy Harvesting with PZT Micro Device
See complete list of publications (13)
Growth and properties of gradient free sol-gel lead zirconate titanate thin films
Local growth of sol-gel films by means of microhotplates
Novel 3D PZT thin film structure for micromechanics
PZT thin film growth and chemical composition control on flat and novel three-dimensional micromachined structures for MEMS devices
Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films
Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices
Taking piezoelectric microsystems from the laboratory to production
Thick PZT sol-gel films for pMUT transducers performances improvement
Vibration Energy Harvesting with PZT Micro Device
See complete list of publications (13)
Use for
Calame, F.
Link to search
All resources
Record appears in
Authorities > People