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Assembly of Silicon Nitride Channels
2017
Fabrication of silicon based micro-channels is typically a complex process involving multiple steps such as lithography, bonding, thin film deposition, etching, surface migration etc. We present a method for the fabrication of microchannels . insired by 2D material transferring techniques, we transfer a 100 nm thick silicon nitride film on top of a silicon nitride coated chip with predefined trenches and holes to form silicon nitride microchannels and membranes.
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Name
2017_Tom_Larsen_MNE.pdf
Access type
openaccess
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9.06 MB
Format
Adobe PDF
Checksum (MD5)
a1d67a90b4db8445f1f42c0247883fae