Preceramic Polymers as Precursor for implantable MEMS Applications

Polymer-derived ceramics (PDCs) offer a variety of unique features that outperform classical powder-sintered ceramics and make PDCs valuable candidates for challenging applications such as implantable MEMS. The precise controllability of the precursors’ chemical composition allows the adjustment of the functional properties such as the electrical conductivity. Well known PDC systems are being customized and shaped in way not being possible before by a sophisticated combination of various advanced microfabrication techniques such as photolithography, 2PP 3D printing, and thermal scanning probe lithography. Continuing the research of a former CTI & SNSF project and resorting to a comprehensive study of the curing and pyrolysis processes of polysilazanes, the current collaborative project Ceramic X.0 targets the fabrication and evaluation of novel ceramics with unique properties and advanced shapes.


Advisor(s):
Brugger, Jürgen
Presented at:
11th NAMIS International Autumn School “Micro & nano systems engineering: from fundamentals to industrial applications”, Freiburg, Germany, October 2-6, 2017
Year:
2017
Keywords:
Laboratories:




 Record created 2018-01-11, last modified 2018-09-13

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