Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry: II. Measurements on a resonant network (vol 24, 065015, 2015)


Published in:
Plasma Sources Science & Technology, 26, 12, 129501
Year:
2017
Publisher:
Bristol, Iop Publishing Ltd
ISSN:
0963-0252
Laboratories:




 Record created 2017-12-04, last modified 2019-02-28


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