Loading...
research article
A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing
We demonstrated a waveguide crossing for submicron silicon waveguides with average insertion loss of 0.18±0.03 dB and crosstalk of -41±2 dB, uniform across an 8-inch wafer. The device was fabricated in a CMOS-compatible process using 248 nm lithography, with only one patterning step.
Type
research article
Authors
Zhang, Yi
•
Yang, Shuyu
•
Lim, Andy Eu-Jin
•
Lo, Guo-Qiang
•
•
Baehr-Jones, Tom
•
Hochberg, Michael
Publication date
2013
Published in
Volume
25
Issue
5
Start page
422
End page
425
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
December 1, 2017
Use this identifier to reference this record