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research article
Carrier Mobility Extraction in FETs
In this paper, we propose an accurate method to extract the free carrier mobility in FETs. This derivation relies only on the drift-diffusion transport model without the need to predefine the gate-voltage-mobility dependence. This approach has been assessed with TCAD simulations, confirming its robustness even in the presence of short channel effects. Exploiting the proposed model, free carrier mobility is obtained in a 28-nm commercial bulk CMOS process at room temperature.
Type
research article
Web of Science ID
WOS:000417727500068
Authors
Publication date
2017
Published in
Volume
64
Issue
12
Start page
5279
End page
5283
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 25, 2017
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