Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

We present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for thermal scanning probe lithography with an achieved half-pitch resolution of 50.5±3 nm.


Presented at:
43rd Micro and Nano Engineering Conference, Braga, Portugal, September 18-22, 2017
Year:
2017
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2017-10-09, last modified 2018-09-13

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