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conference paper
Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
2017
Proceedings
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Name
proceedings-01-00391-v2.pdf
Type
Postprint
Access type
openaccess
Size
971.12 KB
Format
Adobe PDF
Checksum (MD5)
bbd7038dd7c6cfb4205981678a2312c8