Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing


Published in:
Proceedings, 1, 4, 391
Year:
2017
Laboratories:




 Record created 2017-09-27, last modified 2018-09-13

Postprint:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)