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  4. Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica
 
conference paper

Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica

Ebrahim, Fatmah  
•
Charvet, Raphael
•
Denereaz, Cyril
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Heisterkamp, A
•
Herman, Pr
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2017
Frontiers In Ultrafast Optics: Biomedical, Scientific, And Industrial Applications Xvii
Conference on Frontiers in Ultrafast Optics - Biomedical, Scientific, and Industrial Applications XVII

Femtosecond laser exposure of fused silica combined with chemical etching has opened up new opportunities for three-dimensional freeform processing of micro-structures that can form complex micro-devices of silica, integrating optical, mechanical and/or fluidic functionalities. Here, we demontrate an expansion of this process with an additional fabrication step that enables the integration of three-dimensional embedded metallic structures out of useful engineering metals such as silver, gold, copper as well as some of their alloys. This additional step is an adaptation of the pressure infiltration for the insertion of high conductivity, high melting point metals and alloys into topologically complex, femtosecond laser-machined cavities in fused silica. This produces truly 3-dimensional microstructures, including microcoils and needles, within the bulk of glass substrates. Combining this added capability with the existing possibilities of femtosecond laser micromachining (i.e. direct written waveguides, microchannels, resonators, etc.) opens up a host of potential applications for the contactless fabrication of highly integrated monolithic devices that include conductive element of all kind. We present preliminary results from this new fabrication process, including prototype devices that incorporate 3D electrodes with aspect ratios of 1:100 and a feature size resolution down to 2 um. We demonstrate the generation of high electric field gradients (of the order of 1013 Vm-2) in these devices due to the 3-dimensional topology of fabricated microstructures.

  • Details
  • Metrics
Type
conference paper
DOI
10.1117/12.2256550
Web of Science ID

WOS:000405592300019

Author(s)
Ebrahim, Fatmah  
Charvet, Raphael
Denereaz, Cyril
Mortensen, Andreas  
Bellouard, Yves  
Editors
Heisterkamp, A
•
Herman, Pr
•
Meunier, M
•
Osellame, R
Date Issued

2017

Publisher

Spie-Int Soc Optical Engineering

Publisher place

Bellingham

Published in
Frontiers In Ultrafast Optics: Biomedical, Scientific, And Industrial Applications Xvii
ISBN of the book

978-1-5106-0629-6

978-1-5106-0630-2

Total of pages

1

Series title/Series vol.

Proceedings of SPIE

Volume

10094

Start page

100940U

Note

This is only a conference presentation; there is no associated paper in the proceedings of this conference

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
GALATEA  
LMM  
Event nameEvent placeEvent date
Conference on Frontiers in Ultrafast Optics - Biomedical, Scientific, and Industrial Applications XVII

San Francisco, CA

JAN 29-FEB 02, 2017

Available on Infoscience
September 5, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/140378
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