Method to fabricate finfet sensors, in particular, finfet sensors for ionic, chemical and biological applications on si-bulk

The present invention relates to a method of producing a FinFET sensor device comprising the steps of: providing a silicon substrate; etching the silicon substrate to produce at least one upwardly extending Fin structure externally protruding from a surface of the silicon substrate; depositing a spacer layer on the at least one Fin structure; anisotropically etching a section of the spacer layer to expose the underlying silicon; isotropic etching of the exposed silicon surrounding the at least one Fin structure; and carrying out oxidation of the silicon surrounding the at least one Fin structure to produce a Fin structure of silicon inside the at least one Fin structure. The present invention also relates to FinFET sensor devices produced by the above method.

Other identifiers:
EPO Family ID: 54141856
TTO: 6.1375

 Record created 2017-05-24, last modified 2018-10-18

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