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patent
Multilayer mems cantilevers
Fantner, Georg Ernest
•
Adams, Jonathan David
•
Hosseini, Nahid
2016
The present invention relates to a cantilever or membrane comprising a body and an elongated beam attached to the body. The elongated beam includes a first layer comprising a first material, a second layer comprising a second material having an elastic modulus different to that of the first material, a third layer comprising a third material having an elastic modulus different to that of the first material, where the first layer is sandwiched between the second layer and the third layer.
Type
patent
EPO Family ID
56263998
Inventors
Fantner, Georg Ernest
•
Adams, Jonathan David
•
Hosseini, Nahid
Note
Alternative title(s) : (de) Mehrschichtige mems-träger (fr) Micropoutres de mems multicouche
TTO classification
TTO:6.1363
EPFL units
Patent number | Country code | Kind code | Date issued |
US10308500 | US | B2 | 2019-06-04 |
US2018141801 | US | A1 | 2018-05-24 |
EP3298416 | EP | A1 | 2018-03-28 |
WO2016189451 | WO | A1 | 2016-12-01 |
Available on Infoscience
May 11, 2017
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