Method and device for determining plasma characteristics
The invention relates to a method and a device for determining plasma characteristics, the method comprising the steps of: - arranging a measurement probe (2) having a self-inductance in proximity to a plasma (3) to establish inductive coupling between the plasma (3) and the measurement probe (2); - determining a mutual inductance (Mprobe/plasma) between the measurement probe (2) and the plasma (3); - depending on the mutual inductance (Mprobe/plasma), estimating a quantity representing the plasma complex conductivity (σ); and - deriving at least one plasma parameter from the plasma complex conductivity (σ).
53180537
Priority number(s): EP20150166251 20150504
Alternative title(s) : (de) Verfahren, messonde und mesvorrichtung zur bestimmung von plasmaeigenschaften (fr) Méthode, sonde de mesure et appareil de mesure pour déterminer des charactéristiques plasma (en) Method, measurement probe and measurement system for determining plasma characteristics
TTO:6.1324
Patent number | Country code | Kind code | Date issued |
EP3292559 | EP | B1 | 2019-08-07 |
EP3292559 | EP | A1 | 2018-03-14 |
WO2016177740 | WO | A1 | 2016-11-10 |