Method and device for determining plasma characteristics

The invention relates to a method and a device for determining plasma characteristics, the method comprising the steps of: - arranging a measurement probe (2) having a self-inductance in proximity to a plasma (3) to establish inductive coupling between the plasma (3) and the measurement probe (2); - determining a mutual inductance (Mprobe/plasma) between the measurement probe (2) and the plasma (3); - depending on the mutual inductance (Mprobe/plasma), estimating a quantity representing the plasma complex conductivity (σ); and - deriving at least one plasma parameter from the plasma complex conductivity (σ).


Year:
2016
Note:
Priority number(s): EP20150166251 20150504
Other identifiers:
EPO Family ID: 53180537
TTO: 6.1324
Patent number(s):
Laboratories:




 Record created 2017-05-11, last modified 2018-09-13


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