Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching
 
research article

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Lisunova, Yuliya  
•
Spieser, M.
•
Juttin, R.D.D.
Show more
2017
Microelectronic Engineering

Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication of high-resolution nanopatterns in hard substrates. Here, we investigate the key process parameters allowing the fabrication of high aspect ratio nanopatterns in silicon. By a combination of resist heat treatment, the use of a hard mask and optimized etch parameters during pattern transfer, we amplified the shallow resist patterns by a factor of 100 into the silicon substrate. Low surface roughness and vertical sidewalls are thereby maintained. We demonstrate the fabrication of 240 nm wide lines and 4 μm deep single crystal silicon patterns.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

1-s2.0-S016793171730134X-main.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

restricted

Size

855.19 KB

Format

Adobe PDF

Checksum (MD5)

d879cad0e2e70023db2b63599e6abfca

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés