Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source
 
research article

Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source

Guittienne, Philippe  
•
Jacquier, Rémy  
•
Howling, Alan  
Show more
2017
Plasma Sources Science and Technology

A large area antenna generates a plasma by both inductive and capacitive coupling; it is an electromagnetically coupled plasma source. In this work, experiments on a large area planar RF antenna source are interpreted in terms of a multi-conductor transmission line coupled to the plasma. This electromagnetic treatment includes mutual inductive coupling using the complex image method, and capacitive matrix coupling between all elements of the resonant network and the plasma. The model reproduces antenna input impedance measurements, with and without plasma, on a 1.2x1.2 m2 antenna used for large area plasma processing. Analytic expressions are given, and results are obtained by computation of the matrix solution. This method could be used to design planar inductive sources in general, by applying the termination impedances appropriate to each antenna type.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

Guittienne_2017_PSST_26_035010.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

Size

1.49 MB

Format

Adobe PDF

Checksum (MD5)

596cf19615a7c6d7a93cdb35f2e0e274

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés