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conference paper
Die Level Release of Silicon Photonic MEMS
2016
2016 International Conference On Optical Mems And Nanophotonics (OMN)
We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size.
Type
conference paper
Web of Science ID
WOS:000389586300021
Authors
Jacobs, Jonas
•
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Kiss, Marcell
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Han, Sangyoon
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Scok, Tae Joon
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Wu, Ming C.
•
Publication date
2016
Publisher
Published in
2016 International Conference On Optical Mems And Nanophotonics (OMN)
ISBN of the book
978-1-5090-1035-6
Publisher place
New York
Total of pages
2
Series title/Series vol.
International Conference on Optical MEMS and Nanophotonics
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
January 24, 2017
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