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conference paper

Solid-gap resonators based on PVDF-TrFE

Lopez, Mariazel Maqueda
•
Casu, Emanuele Andrea  
•
Vitale, Wolfgang Amadeus  
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2016
2016 IEEE Silicon Nanoelectronics Workshop (SNW)
2016 IEEE Silicon Nanoelectronics Workshop (SNW)

High frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-TrFE gaps applied in RF MEMS is presented for the first time. Measurements of the polarization of the material and the frequency and voltage dependence of the capacitance in the actuation gaps of the resonators are provided.

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Type
conference paper
DOI
10.1109/SNW.2016.7577990
Web of Science ID

WOS:000391250500031

Author(s)
Lopez, Mariazel Maqueda
•
Casu, Emanuele Andrea  
•
Vitale, Wolfgang Amadeus  
•
Ionescu, Adrian Mihai  
Date Issued

2016

Publisher

IEEE

Publisher place

New York

Journal
2016 IEEE Silicon Nanoelectronics Workshop (SNW)
Total of pages

2

Start page

72

End page

73

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
CMI  
Event nameEvent placeEvent date
2016 IEEE Silicon Nanoelectronics Workshop (SNW)

Honolulu, HI, USA

12-13 June 2016

Available on Infoscience
October 14, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/129757
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