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Parylene-Based Hollow Nanomechanical Resonators For Bioapplications
We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.
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Name
2016_Annalisa_De_Pastina_MNE.pdf
Access type
openaccess
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345.4 KB
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Adobe PDF
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4a09bf90e5bd7cc895a1b448f1f55287