Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.


Presented at:
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016
Year:
2016
Keywords:
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 Record created 2016-09-15, last modified 2018-09-13

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