Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer

We present here the fabrication of large suspended sheets of graphene for mechanical resonators. The diameter of the circular resonators varies from 1.2 μm to 26.5 μm resulting in diameter-to-thickness aspect ratios as large as 74000. The membranes were fabricated in arrays with yields of up to more than 90%. Assuming low to moderate tensile stress, <1 GPa, the mechanical resonance frequency of these structures potentially spans the range from ~1 MHz to ~1 GHz. The successfully fabrication of graphene membranes will allow us to first study their mechanics (resonance frequency and damping) and later explore their use for various sensing applications, including mass sensing.


Presented at:
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016
Year:
2016
Keywords:
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 Record created 2016-09-05, last modified 2018-03-17

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