Loading...
semester or other student projects
Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces
2016
This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O2 plasma and rehydration, manual pre-bonding and final annealing. Also a study of the influence of the speed of annealing on the bonding strength is conducted.
Loading...
Name
2016_spring_Semester_Thiriet_Pierre-Emmanuel.pdf
Access type
openaccess
Size
1.71 MB
Format
Adobe PDF
Checksum (MD5)
bed182c7d9ae17ee404ed2ebd6fcc650