Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore the quality factor. Also, improvement in, quality factor, can be achieved via acoustic matching between the electrodes and the active piezoelectric layer.


Presented at:
2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016
Year:
2016
Publisher:
New York, Ieee
ISBN:
978-1-5090-2091-1
Keywords:
Laboratories:




 Record created 2016-08-26, last modified 2018-09-13

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