Pyrolysed carbon resonators – Fabrication and characterization

Study of resonators composed of silicon nitride and pyrolysed carbon.


Presented at:
39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013
Year:
2013
Laboratories:




 Record created 2016-03-17, last modified 2018-03-17


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