Recent EDS instrumental advances in STEM: from principles to applications

The electron microscopy community makes a wide use of Energy Dispersive X-ray Spectrometry (EDS) for elemental mapping in STEM. This technique was however long reckoned slow, dozens of minutes if not an hour, to collect enough information for one map. Recent instrumental advances have dramatically changed the situation, reducing the acquisition time to minutes, improving the maps quality and boosting their spatial resolution beyond the nanometer scale or even down to the single atom column in crystalline materials. Application examples to Nb-Sn superconductors and Ni-base superalloys


Published in:
Swiss Society for Optics and Microscopy Bulletin, 1+2, 7-11
Year:
2013
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 Record created 2016-03-07, last modified 2018-03-17

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