X-ray-induced Cu deposition and patterning on insulators at room temperature

X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.


Published in:
Journal Of Synchrotron Radiation, 22, 1524-1527
Year:
2015
Publisher:
Chester, International Union of Crystallography
ISSN:
1600-5775
Keywords:
Laboratories:




 Record created 2016-02-16, last modified 2018-09-13


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