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research article

X-ray-induced Cu deposition and patterning on insulators at room temperature

Hsu, Pei-Cheng
•
Chen, Yu-Sheng
•
Hwu, Yeukuang
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2015
Journal Of Synchrotron Radiation

X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.

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