Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network
 
research article

Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network

Guittienne, Ph
•
Jacquier, R.
•
Howling, A. A.
Show more
2015
Plasma Sources Science & Technology

Measurements and analysis of a radio-frequency planar antenna are presented for applications in inductively-coupled plasma processing. The network of inductive and capacitive elements exhibits high currents under resonance which are efficient for plasma generation. Mode frequencies and impedances are accurately calculated by accounting for the mutual partial inductances using the impedance matrix. The effect of plasma inductive coupling on mode frequency shift and mode impedance is estimated using the complex image method, giving good agreement with experiment. It is proposed that the complex image method combined with the partial inductance concept (see the accompanying paper, Part I (Howling et al 2015 Plasma Sources Sci. Technol. 24 065014)) offers a general way to calculate the impedance characteristics of inductively-coupled plasma sources in planar geometry.

  • Details
  • Metrics
Type
research article
DOI
10.1088/0963-0252/24/6/065015
Web of Science ID

WOS:000368117100020

Author(s)
Guittienne, Ph
Jacquier, R.
Howling, A. A.
Furno, I.
Date Issued

2015

Publisher

Iop Publishing Ltd

Published in
Plasma Sources Science & Technology
Volume

24

Issue

6

Article Number

065015

Subjects

inductively-coupled plasma

•

complex image method

•

partial inductance

•

RF antenna

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SPC  
Available on Infoscience
February 16, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/123936
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés