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conference poster not in proceedings
Single Crystal Silicon UHF Wine-Glass Ring Resonator with HfO2 Solid Dielectric Gap embedded in a Field Effect Transistor
2014
In this work we present an ultra-high-frequency (UHF) single crystal silicon ring resonator with two embedded FETs. Electromechanical coupling is realized through a high-K, namely 10 nm HfO2, dielectric solid-gap sandwiched between the gate electrode and the ring lateral surface. The higher permittivity of the solid-gap material as well as the technological possibility of having narrower gap than air-gap counterparts, will uniquely allow to improve at the same time the electromechanical coupling and the FET amplifcation by increasing the gate capacitance.
Type
conference poster not in proceedings
Publication date
2014
Subjects
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Lausanne, CH | September 22-26, 2014 | |
Available on Infoscience
February 3, 2016
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