TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime

In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO2, with SiO2 as a sacrificial layer. The TiO2 film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization. (C) 2015 American Vacuum Society.


Published in:
Journal Of Vacuum Science & Technology B, 33, 5, 050603
Year:
2015
Publisher:
Melville, A V S Amer Inst Physics
ISSN:
1071-1023
Laboratories:




 Record created 2015-12-02, last modified 2018-01-28


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)