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research article

Solid-gap wine-glass mode disks VB-FET resonators applied to biomass sensing

Lopez, M. Maqueda
•
Badia, M. Fernandez-Bolanos
•
Vitale, W.
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2015
Microelectronic Engineering

The working principle of an electromechanical resonator for mass sensing applications is based on monitoring the characteristic resonance frequency downshift due to the particles attachment on the surface of the device. Solid-Gap Vibrating-Body Field Effect Transistor (VB-FET) resonators offer an interesting solution for extreme biomass sensing due to their high motional current at resonance, their compatibility with Complementary Metal-Oxide-Semiconductor (CMOS) circuits, high reproducibility of characteristics and the possibility to have exploitable values of the quality factor (Q-factor) in air and liquid operation. In this work a detailed micromechanical analysis of VB-FET disk resonators is carried out, considering geometrical design parameters, geometrical variability, motional resistance for air and solid-gaps, Q-factor and variable particle-resonator sensing cases, permitting quantitative discussions on their suitability for biosensing.

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Type
research article
DOI
10.1016/j.mee.2015.03.005
Web of Science ID

WOS:000362152200011

Author(s)
Lopez, M. Maqueda
Badia, M. Fernandez-Bolanos
Vitale, W.
Ionescu, A. M.  
Date Issued

2015

Publisher

Elsevier Science Bv

Published in
Microelectronic Engineering
Volume

145

Start page

53

End page

57

Subjects

Wine-glass mode disk

•

MEMS resonator

•

Motional resistance

•

Q-factor

•

Mass sensitivity

•

Solid-gap

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
December 2, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/121278
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