A gas viscosity sensor comprises a signal processing circuit and a sensor element, including a gas pressure generating system and a differential pressure measuring system in fluid communication therewith, the differential pressure measuring system comprising a measuring chamber (14) bounded by a thin membrane (28), an inlet-outlet channel or orifice interconnecting the measuring chamber to a source of gas for which the viscosity is to be determined, the inlet- outlet channel or orifice having dimensions adapted to provide resistance to the outflow and inflow of gas in the measuring chamber, and a membrane displacement sensor (32) adapted to measure a time dependent displacement of the membrane due to pressure variations in the measuring cavity.
34942954
Alternative title(s) : (de) Gasviskositätssensor (fr) Capteur de viscosite de gaz
TTO:6.0655
Patent number | Country code | Kind code | Date issued |
EP1864107 | EP | B1 | 2012-10-31 |
US7730766 | US | B2 | 2010-06-08 |
US2009229351 | US | A1 | 2009-09-17 |
EP1864107 | EP | A1 | 2007-12-12 |
WO2006103542 | WO | A1 | 2006-10-05 |
EP1707940 | EP | A1 | 2006-10-04 |