Laser a cavite verticale et a emission par surface
A tunable Fabry-Perot vertical cavity photonic device and a method of its fabrication are presented. The device comprises top and bottom semiconductor DBR stacks and a tunable air-gap cavity therebetween. The air-gap cavity is formed within a recess in a spacer above the bottom DBR stack. The top DBR stack is carried by a supporting structure in a region thereof located above a central region of the recess, while a region of the supporting structure above the recess and outside the DBR stack presents a membrane deflectable by the application of a tuning voltage to the device contacts.
25200850
27123202
Alternative title(s) : (de) Oberflächenemittierender laser mit vertikalem resonator (fr) Laser a cavite verticale et a emission par surface (en) Vertical cavity surface emitting laser
TTO:6.0257
Patent number | Country code | Kind code | Date issued |
JP4174322 | JP | B2 | 2008-10-29 |
KR100622852 | KR | B1 | 2006-09-18 |
KR100623406 | KR | B1 | 2006-09-18 |
CN1263209 | CN | C | 2006-07-05 |
DE60204007 | DE | T2 | 2006-03-16 |
ES2241988 | ES | T3 | 2005-11-01 |
DE60204007 | DE | D1 | 2005-06-09 |
AT295011 | AT | T | 2005-05-15 |
US6890778 | US | B2 | 2005-05-10 |
HK1069020 | HK | A1 | 2005-05-06 |
EP1378039 | EP | B1 | 2005-05-04 |
JP2004538621 | JP | A | 2004-12-24 |
US6828168 | US | B2 | 2004-12-07 |
JP2004534383 | JP | A | 2004-11-11 |
CN1524328 | CN | A | 2004-08-25 |
CN1509406 | CN | A | 2004-06-30 |
EP1378039 | EP | A2 | 2004-01-07 |
EP1368623 | EP | A1 | 2003-12-10 |
KR20030084994 | KR | A | 2003-11-01 |
KR20030083735 | KR | A | 2003-10-30 |
US2003169786 | US | A1 | 2003-09-11 |
US2003162315 | US | A1 | 2003-08-28 |
US6546029 | US | B2 | 2003-04-08 |
US6542531 | US | B2 | 2003-04-01 |
WO02075868 | WO | A3 | 2002-12-12 |
AU2002234838 | AU | A1 | 2002-10-03 |
WO02075263 | WO | A1 | 2002-09-26 |
WO02075868 | WO | A2 | 2002-09-26 |
US2002131464 | US | A1 | 2002-09-19 |
US2002131458 | US | A1 | 2002-09-19 |